Design and Analysis of MEMS-Based Capacitive Power Inverter Using Electrostatic Transduction

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dc.contributor.authorTuran, Salih Rahmi
dc.contributor.authorUlkir, Osman
dc.contributor.authorKuncan, Melih
dc.date.accessioned2024-12-24T19:16:12Z
dc.date.available2024-12-24T19:16:12Z
dc.date.issued2024
dc.departmentSiirt Üniversitesi
dc.description.abstractIn this study, a capacitive microelectromechanical system (MEMS) based DC/AC power inverter design for renewable energy applications is proposed, modeled, and analyzed. In the proposed approach, electrostatic actuation is preferred to develop a DC/AC power inverter with varying phase overlap lengths for solar energy systems. The operating voltage required during the analysis is applied to the active part as the tensile stress. Thus, the maximum displacement is achieved with less instability. The developed inverter is based on MEMS to achieve miniaturized performances, producing smooth sine wave output, efficiently obtaining the signal frequency, and low power consumption. The proposed inverter has a thickness of 325 ?m, an active settlement area of 45x45x0.585 mm3, and an initial capacitance value of 2.9 pF. In addition, a 50 Hz mechanical resonance frequency was used to be compatible with the frequency of the city network. It can convert voltage values between 0.5V and 24V DC with a MEMS power inverter. Since the inverter is based on a capacitive structure, it provides near-zero power consumption. The frequency and waveform of the converted DC/AC signal match the AC signal of a power grid with an efficiency of 5%.
dc.identifier.doi10.17694/bajece.1419596
dc.identifier.endpage136
dc.identifier.issn2147-284X
dc.identifier.issue2
dc.identifier.startpage127
dc.identifier.trdizinid1278362
dc.identifier.urihttps://doi.org/10.17694/bajece.1419596
dc.identifier.urihttps://search.trdizin.gov.tr/tr/yayin/detay/1278362
dc.identifier.urihttps://hdl.handle.net/20.500.12604/4283
dc.identifier.volume12
dc.indekslendigikaynakTR-Dizin
dc.language.isoen
dc.relation.ispartofBalkan Journal of Electrical and Computer Engineering
dc.relation.publicationcategoryMakale - Ulusal Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/openAccess
dc.snmzKA_20241222
dc.subjectMEMS
dc.subjectrenewable energy.
dc.subjectElectrostatic actuation
dc.subjectminiaturization
dc.subjectpower inverter
dc.titleDesign and Analysis of MEMS-Based Capacitive Power Inverter Using Electrostatic Transduction
dc.typeArticle

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